Clean Room & 奈米制造设施
电子游戏软件的开放用户设施
对电子游戏软件和外部用户开放, this laboratory is home to over 30 high-end micro and nanoscale instrumentation systems worth several million dollars.
Comprised of 1,500平方英尺的一级,000 and Class 10,000个洁净室空间, the lab enables highly sensitive materials and devices to be fabricated free from contaminants. In addition, there is over 2,000 square feet of service and support space. The lab is supported by an air handling unit that completely cleans and renews all the air in the facility every 45 seconds.
Specs
- 1500平方英尺的1000级和10000级洁净室空间
- 2000平方英尺的服务和支持区域空间
- 10,000 CFM air handling unit with approximately 75 air changes per hour
- 室温在65-70°F之间
- 相对湿度50-60%
- 18.2兆欧姆去离子水
- House nitrogen (N2) from liquid nitrogen boil off, 35-45 psi
- 压缩干空气(CDA)输送压力90- 100psi
- 30+资本设备系统
Safe Environment
- Safety eyewash and safety shower inside and outside of cleanroom
- 3个用于化学工作的排气罩.
- Gowning is required before entering the cleanroom to protect the environment and samples in process. Particulate-free bouffant caps coveralls, shoe covers, gloves, and safety glasses are provided.
- Face shields, 耐化学性围裙, protective sleeves, and heavy chemical resistant gloves are provided for chemical work.
- All high voltage equipment has at least one EMO for emergency shut down should problems arise
- 没有剧毒气体.
Dedicated Staff
每位用户都接受我们员工的培训. The staff is there to assist users in troubleshooting and offer support when necessary.
Why BCISCRNF
- 最先进的设施和设备
- 适合小型初创公司和大学
- 易于新用户设置
- 成本效益/负担得起的价格
- 一对一的培训
Laboratory
标准操作程序
- New users must run equipment at least 3 times during daytime operation (9-5).
- 在适用的情况下，设备在使用前是否准备好.
- 只使用设备，因为它是打算被使用.
- 向工作人员报告任何问题.
ORIENTATION & TRAINING
Before orientation, Non-BC users must complete the 外部用户设施使用协议. 电子游戏软件用户 must complete the 授权申请表格. After approval, new users must undergo a training and orientation program before use of the facility. Please 联系史蒂夫·谢泼德 安排训练时间.
BILLING
请注意，电子游戏软件的学期是NET 30. All facility invoices must be paid within 30 days of invoice date. Invoices that are past due over 60 days will result in suspension of user access until all outstanding invoices are paid in full.
GOWNING
穿礼服必须由上而下. Users are required to put on their cap, hood, suit, boots, and gloves in that order.
BUDDY SYSTEM
For safety reasons, we ask that users utilize the buddy system when working in the lab. When performing potentially hazardous/dangerous operations always make sure someone is in the laboratory with you. When a user is only in the lab observing—as part of the buddy system—that user will not be charged clean room usage fee.
CANCELLATION POLICY
The Integrated Sciences Cleanroom and 奈米制造设施 has a 24-hour cancellation policy. Please notify the Manager at least 24 hours in advance if you can not honor your reservation. We realized that all projects require a certain process flow between tools, 所以一个问题可能会打乱你的整个计划. Under these circumstances, the 24 hour cancellation policy would not apply.
Please email Steve Shepard 如有任何有关取消的问题.
Equipment and Rates
| General | Internal Rates (Boston College) | 对外学术收费 (non profit) | 外部商业 Rates |
|---|---|---|---|
| Cleanroom Use | $32/hr | $32/hr | $60/hr |
| 远程工作人员协助 | $100/hr | $100/hr | $100/hr |
| Equipment | Vendor & Model | Internal Rates | 对外学术收费 | 外部商业 Rates |
|---|---|---|---|---|
| 扫描电子显微镜 | JEOL JSM-7001F | $44/hr | $44/hr | $105/hr |
| EDX (on SEM) | Oxford | included in SEM rate | included in | included in |
| 聚焦离子束系统 | JEOL JIB-4500 | $45/hr | $55/hr | $115/hr |
| 纳米操作与电探测 Micromanipulator | Kleindiek MM3A | included in FIB rate | included in FIB rate | included in FIB rate |
|
| Equipment | Vendor & Model | Internal Rates | 对外学术收费 | 外部商业 Rates |
|---|---|---|---|---|
| Mask Aligner | Kari Suss MA6 | -- | -- | -- |
| 电子束书写器(扫描电镜) | Nabity | $44/hr | $44/hour | $105/hr |
| 抗旋转通风柜 |
FWS-196-SS | -- | -- | -- |
| Resist Spinner (2) |
Cee 100 | -- | -- | -- |
| Resist Spinner | Laurell WS-400E | -- | -- | -- |
| Hot Plates (2) | -- | -- | -- | -- |
| 光刻胶稳定系统 | Optical Associates PL-16-100 UV | -- | -- | -- |
| 热扫描探针光刻(t-SPL)系统 |
Nanofrazor Scholar | -- | -- | -- |
| 直写无掩码对齐器 |
µMLA | -- | -- | -- |
*If the 海德堡纳米剃刀学者 was used for data collection that was later used in any publications, posters or presentations etc., please make sure to acknowledge the support from the National Science Foundation by citing the funding grant with the following statement: “The research reported in this [publication/talk/poster] was supported by the NSF MRI Program under the award number 1S10OD026910-01A1.”2117711"; Principal Investigator: Kenneth, Burch
| Equipment | Vendor & Model | Internal Rates | 对外学术收费 | 外部商业 Rates |
|---|---|---|---|---|
| 溅射沉积系统 | AJA International Orion 8 | $40/hour | $40/hour | $95/hr |
| 台式溅射沉积 | Anatech Hummer 6.6 | $10/run | $10/run | $25/run |
| 原子层沉积 | Ultratech | $15/hr | $15/hr | $50/hr |
| 电子束沉积系统 | Kurt J. LeskerPVD-75 | $35/run | $40/run | $75/run |
| Thermal Evaporator | Kurt J. LeskerPVD-75 | $10/hr | $10/hr | $45/hr |
| 溅射沉积系统 | Kurt J. LeskerPVD-75 | $35/run | $35/run | $75/run |
| PE-CVD | Plasma-Therm Vesaline LL | $40/run | $40/run | $95/run |
| 电子束/热蒸发器 | Sharon Vacuum | $35/hr | $40/hr | $75/hr |
| 电镀系统 | Reynolds Tech | -- | -- | -- |
| Atomic Layer Deposition System | Arradiance GemStar ALD System | $15/hr | $15/hr | $50/hr |
| Equipment | Vendor & Model | Internal Rates | 对外学术收费 | 对外商业费率 |
|---|---|---|---|---|
| Optical Microscope (High Power) | Olympus BX61 | -- | -- | -- |
| Optical Microscope (Low Power) | Carl Zeiss, Inc. | -- | -- | -- |
| Reflectometer | 任务峰值光学 MP100-S | -- | -- | -- |
| 表面轮廓曲线仪 | Veeco Dektak 150 | -- | -- | -- |
| 光谱椭圆计 | J.A.WoollamVertical VASE | -- | -- | -- |
| Equipment | Vendor & Model | Internal Rates | 对外学术收费 | 对外商业费率 |
|---|---|---|---|---|
| ICP RIE | Plasma-ThermVersaline LL ICP | $40/hr | $40/hr | $95/hr |
| 酸蚀通风柜 | Reynolds Tech FWS-196-4910 | -- | -- | -- |
| UV-Ozone Stripper | Samco UV-1 | -- | -- | -- |
| 微波等离子体蚀刻 | PVATePla PS-210 | -- | -- | -- |
| XeF2 Etch System | XACTIX X-SYS- EXP Xetch | $15/hr | $20/hr | $50/hr |
| Equipment | Vendor & Model | Internal Rates | 对外学术收费 | 对外商业费率 |
|---|---|---|---|---|
| 溶剂清洗通风柜 | Reynolds Tech FWS-196-SS | -- | -- | -- |
| 临界点干燥器 | Tousimis Autosamdri-815B | $8/run | $15/run | $25/run |
| Equipment | Vendor & Model | Internal Rates | 对外学术收费 | 对外商业费率 |
|---|---|---|---|---|
| Atmospheric Furnace | 林德伯格/蓝M 3区管式炉STF55666C | $15/hr | $20/hr | $50/hr |
| 通用烤箱(2个) | -- | -- | -- | -- |
| Vacuum Oven (2) | -- | -- | -- | -- |
| 快速热处理器 | Allwin21 RTP | $5/run | $10/run | $20/run |
| Equipment | Vendor & Model | Internal Rates | 对外学术收费 | 对外商业费率 |
|---|---|---|---|---|
| Bead Blaster | Econoline磨料喷砂箱 | $15/hr | $15/hr | $40/hr |
| Dicing Saw | DiscoUSA DAD3220 | $16/hr* | $20/hr* | $65/hr* |
| Diamond Wheel Saw | South Bay TechModel 650 | -- | -- | -- |
| Wire Bonder | West-Bond Model 747630E | $10/hr | $15/hr | $35/hr |
| Equipment | Vendor & Model | Internal Rates | 对外学术收费 | 对外商业费率 |
|---|---|---|---|---|
| RF LCR Meter | Agilent 4287A | -- | -- | -- |
| Probe/Test Station | Cascade Microtech M150 | -- | -- | -- |
| 四点探测站 | Jandel MHMP/RMS-AR | -- | -- | -- |
常见问题
A Class 1,000 cleanroom means that you would find fewer than 1,000 particles greater than 0.尺寸为每平方英尺5微米. A class 10,000 clean room would have fewer than 10,000 particles greater than 0.每平方英尺5英寸. The lab is supported by an air handling unit that completely filters and renews the air in the facility every 45 seconds.
Usage is open to Boston College faculty and students, as well as external users. You do not have to be part of the Boston College community to rent equipment in this space.
Contact Steve Shepard, the Acting 奈米制造设施 Manager and he can get you scheduled.
Contact Steve Shepard, the Acting 奈米制造设施 Manager and he can get you started.
Personal Protective Equipment (PPE) is taken very seriously at BC. 进入实验室，所有用户必须穿戴以下PPE:
- 长裤或及踝裙
- 闭趾鞋(不能穿凉鞋、人字拖)
- 眼睛防护(眼镜或安全眼镜)
Parking is easily accessible and available to Clean Room users. Please contact Steve Shepard 了解更多信息.
工厂正在进行的工作示例
Wireless communication system via nanoscale plasmonic antennas, J. Merlo, N. 内斯比特，伊兹·卡姆，A. Rose, L. D’Imperio, C. Yang, J. Naughton, K. Kempa, M. J. 诺顿，《科学报告.31710 DOI: 10.1038/srep 31710 (2016).
Droplet-Tn-Seq combines microfluidics with Tn-Seq identifying complex single-cell phenotypes, D. Thibault, S. Wood, P. Jensen, T. 范·奥皮宁，《生物工程学报》，DOI: 10.1101/391045 (2018).
Hydrogen bonding steers the product selectivity of electro-catalytic CO Reduction, J. Li, X. Li, C. Gunathunge, M. Waegele, PNAS, DOI: 10.1073/pnas.1900761116 (2019).
基于纳米同轴电缆的电化学传感器; B. Rizal, M. Archibald, T. Connolly, S. Shepard, M.J. Burns, T.C Chiles, M.J. 诺顿，分析化学，DOI: 10.1021 / ac402411x (2013).
All-solution-processed micro/nanowires with electroplate welding as transparent conducting electrodes, C. Yang, J. Merlo, L. D’Imperio, A. Rose, Y. Calm, B. Han, J. Gao, G. Zhou, M. Burns, K. Kempa, M.J. 物理状态固化-快速电子游戏正规平台信函. DOI: 10.1002/pssr.201900010 (2019).
可电寻址的数组, optically-transmitting 3D nanostructures on free standing, 柔性聚合物薄膜, L. D’Imperio, A. McCrossan, J. Naughton, J. Merlo, Y. Calm, M. Burns, M.J. 诺顿，柔性印刷电子，DOI: 10.1088/2058 - 8585 / aac8fc (2018).
Label-free capture of breast cancer cells spiked in buffy coats using carbon nanotube antibody microarrays， Farhad Khosravi等，纳米技术，DOI: 0.1088/0957-4484/27/13/13LT02 (2016).
Cuddalorepatta, G. K., van Rees, W. M., Li, H., Pantuso, D.,Mahadevan L.M. & Vlassak, J.J.," Poisson’s ratio and residual strain of freestanding ultra-thin films", 固体力学与物理学报. http://doi.org/10.1016/j.jmps.2019.103821
Cuddalorepatta, G. K., Li, H., Pantuso, D., & Vlassak, J.J. "Measurement of the stress-strain behavior of freestanding ultra-thin films", Materialia,Vol. 9,100502, 2020. http://doi.org/10.1016/j.mtla.2019.100502.
Cuddalorepatta, G. K., Sim, G., Li, H., Pantuso, D., & Vlassak, J.J. "Residual stress–driven test technique for freestanding ultrathin films: Elastic behavior and residual strain" Journal of Materials Research, 34(20), 3474-3482, 2019. http://doi.org/10.1557/jmr.2019.278
Nanofabrication & Cleanroom Facility
Chris Gunderson
Boston College
245 Beacon St.
Room #005 C
Chestnut Hill, MA 02467
617 552 0049
gunderch@mackinbridges.net